diff --git a/llvm/test/tools/llvm-cov/sources-specified.test b/llvm/test/tools/llvm-cov/sources-specified.test
--- a/llvm/test/tools/llvm-cov/sources-specified.test
+++ b/llvm/test/tools/llvm-cov/sources-specified.test
@@ -32,7 +32,6 @@
 SHOW: {{.*}}sources_specified{{.*}}
 SHOW: {{.*}}sources_specified{{.*}}
 
-
 # Test "export" command. Use a temp .json file as output is a single line.
 RUN: llvm-cov export -instr-profile %S/Inputs/sources_specified/main.profdata \
 RUN:   -path-equivalence=/tmp,%S/Inputs \
diff --git a/llvm/tools/llvm-cov/CodeCoverage.cpp b/llvm/tools/llvm-cov/CodeCoverage.cpp
--- a/llvm/tools/llvm-cov/CodeCoverage.cpp
+++ b/llvm/tools/llvm-cov/CodeCoverage.cpp
@@ -42,6 +42,7 @@
 #include <functional>
 #include <map>
 #include <system_error>
+#include <unordered_map>
 
 using namespace llvm;
 using namespace coverage;
@@ -80,6 +81,13 @@
   /// directory, recursively collect all of the paths within the directory.
   void collectPaths(const std::string &Path);
 
+  /// Check if the two given two files are the same file.
+  bool isEquivalentFile(StringRef FilePath1, StringRef FilePath2);
+
+  /// Retrieve a file status with a cache.
+  Optional<sys::fs::file_status>
+  CodeCoverageTool::getFileStatus(StringRef FilePath);
+
   /// Return a memory buffer for the given source file.
   ErrorOr<const MemoryBuffer &> getSourceFile(StringRef SourceFile);
 
@@ -153,6 +161,10 @@
   /// remapped to, when using -path-equivalence.
   Optional<std::pair<std::string, std::string>> PathRemapping;
 
+  // File status cache used when finding the same file.
+  std::unordered_map<std::string, Optional<sys::fs::file_status>>
+      FileStatusCache;
+
   /// The architecture the coverage mapping data targets.
   std::vector<StringRef> CoverageArches;
 
@@ -239,6 +251,29 @@
   }
 }
 
+Optional<sys::fs::file_status>
+CodeCoverageTool::getFileStatus(StringRef FilePath) {
+  auto It = FileStatusCache.find(FilePath.str());
+  if (It != FileStatusCache.end())
+    return It->second;
+
+  Optional<sys::fs::file_status> result;
+  sys::fs::file_status status;
+  if (!sys::fs::status(FilePath, status))
+    result = status;
+
+  FileStatusCache.emplace(std::string(FilePath), result);
+  return result;
+}
+
+bool CodeCoverageTool::isEquivalentFile(StringRef FilePath1,
+                                        StringRef FilePath2) {
+  auto file_status1 = getFileStatus(FilePath1);
+  auto file_status2 = getFileStatus(FilePath1);
+  return file_status1.hasValue() && file_status2.hasValue() &&
+         sys::fs::equivalent(file_status1.getValue(), file_status2.getValue());
+}
+
 ErrorOr<const MemoryBuffer &>
 CodeCoverageTool::getSourceFile(StringRef SourceFile) {
   // If we've remapped filenames, look up the real location for this file.
@@ -248,9 +283,11 @@
     if (Loc != RemappedFilenames.end())
       SourceFile = Loc->second;
   }
+
   for (const auto &Files : LoadedSourceFiles)
-    if (sys::fs::equivalent(SourceFile, Files.first))
+    if (isEquivalentFile(SourceFile, Files.first))
       return *Files.second;
+
   auto Buffer = MemoryBuffer::getFile(SourceFile);
   if (auto EC = Buffer.getError()) {
     error(EC.message(), SourceFile);