diff --git a/llvm/cmake/modules/AddLLVM.cmake b/llvm/cmake/modules/AddLLVM.cmake
--- a/llvm/cmake/modules/AddLLVM.cmake
+++ b/llvm/cmake/modules/AddLLVM.cmake
@@ -1937,7 +1937,13 @@
         get_filename_component(git_dir ${git_output} ABSOLUTE BASE_DIR ${path})
         # Some branchless cases (e.g. 'repo') may not yet have .git/logs/HEAD
         if (NOT EXISTS "${git_dir}/logs/HEAD")
-          file(WRITE "${git_dir}/logs/HEAD" "")
+          execute_process(COMMAND ${CMAKE_COMMAND} -E touch HEAD
+            WORKING_DIRECTORY "${git_dir}/logs"
+            RESULT_VARIABLE touch_head_result
+            ERROR_QUIET)
+          if (NOT touch_head_result EQUAL 0)
+            return()
+          endif()
         endif()
         set(${out_var} "${git_dir}/logs/HEAD" PARENT_SCOPE)
       endif()