diff --git a/llvm/cmake/modules/HandleLLVMOptions.cmake b/llvm/cmake/modules/HandleLLVMOptions.cmake
--- a/llvm/cmake/modules/HandleLLVMOptions.cmake
+++ b/llvm/cmake/modules/HandleLLVMOptions.cmake
@@ -864,11 +864,11 @@
           CMAKE_SHARED_LINKER_FLAGS)
     endif()
   elseif(uppercase_LLVM_BUILD_INSTRUMENTED STREQUAL "CSIR")
-    append("-fcs-profile-generate=\"${LLVM_CSPROFILE_DATA_DIR}\""
+    append("-fcs-profile-generate=\"${LLVM_CSPROFILE_FILE_PATTERN}\""
       CMAKE_CXX_FLAGS
       CMAKE_C_FLAGS)
     if(NOT LINKER_IS_LLD_LINK)
-      append("-fcs-profile-generate=\"${LLVM_CSPROFILE_DATA_DIR}\""
+      append("-fcs-profile-generate=\"${LLVM_CSPROFILE_FILE_PATTERN}\""
         CMAKE_EXE_LINKER_FLAGS
         CMAKE_SHARED_LINKER_FLAGS)
     endif()