diff --git a/llvm/utils/benchmark/cmake/CXXFeatureCheck.cmake b/llvm/utils/benchmark/cmake/CXXFeatureCheck.cmake
--- a/llvm/utils/benchmark/cmake/CXXFeatureCheck.cmake
+++ b/llvm/utils/benchmark/cmake/CXXFeatureCheck.cmake
@@ -22,8 +22,9 @@
   string(TOUPPER ${FILE} VAR)
   string(TOUPPER "HAVE_${VAR}" FEATURE)
   if (DEFINED HAVE_${VAR})
-    set(HAVE_${VAR} 1 PARENT_SCOPE)
-    add_definitions(-DHAVE_${VAR})
+    if(HAVE_${VAR})
+      add_definitions(-DHAVE_${VAR})
+    endif()
     return()
   endif()
 
@@ -52,7 +53,7 @@
 
   if(RUN_${FEATURE} EQUAL 0)
     message("-- Performing Test ${FEATURE} -- success")
-    set(HAVE_${VAR} 1 PARENT_SCOPE)
+    set(HAVE_${VAR} On CACHE BOOL "CXX feature test")
     add_definitions(-DHAVE_${VAR})
   else()
     if(NOT COMPILE_${FEATURE})
@@ -60,5 +61,6 @@
     else()
       message("-- Performing Test ${FEATURE} -- compiled but failed to run")
     endif()
+    set(HAVE_${VAR} Off CACHE BOOL "CXX feature test")
   endif()
 endfunction()