Index: lib/Driver/Tools.cpp
===================================================================
--- lib/Driver/Tools.cpp
+++ lib/Driver/Tools.cpp
@@ -4900,11 +4900,16 @@
   if (Args.hasFlag(options::OPT_fxray_instrument,
                    options::OPT_fnoxray_instrument, false)) {
     const char *const XRayInstrumentOption = "-fxray-instrument";
-    if (Triple.getOS() == llvm::Triple::Linux &&
-        (Triple.getArch() == llvm::Triple::arm ||
-         Triple.getArch() == llvm::Triple::x86_64)) {
+    if (Triple.getOS() != llvm::Triple::Linux)
+      D.Diag(diag::err_drv_clang_unsupported)
+          << (std::string(XRayInstrumentOption) + " on non-Linux target OS.");
+    switch (Triple.getArch()) {
+    case llvm::Triple::x86_64:
+    case llvm::Triple::arm:
+    case llvm::Triple::aarch64:
       // Supported.
-    } else {
+      break;
+    default:
       D.Diag(diag::err_drv_clang_unsupported)
           << (std::string(XRayInstrumentOption) + " on " + Triple.str());
     }
Index: test/Driver/XRay/xray-instrument-cpu.c
===================================================================
--- test/Driver/XRay/xray-instrument-cpu.c
+++ test/Driver/XRay/xray-instrument-cpu.c
@@ -1,4 +1,4 @@
 // RUN: not %clang -o /dev/null -v -fxray-instrument -c %s
-// XFAIL: amd64-, x86_64-, x86_64h-, arm
+// XFAIL: amd64-, x86_64-, x86_64h-, arm, aarch64, arm64
 // REQUIRES: linux
 typedef int a;
Index: test/Driver/XRay/xray-instrument-os.c
===================================================================
--- test/Driver/XRay/xray-instrument-os.c
+++ test/Driver/XRay/xray-instrument-os.c
@@ -1,4 +1,4 @@
 // RUN: not %clang -o /dev/null -v -fxray-instrument -c %s
 // XFAIL: -linux-
-// REQUIRES-ANY: amd64, x86_64, x86_64h, arm
+// REQUIRES-ANY: amd64, x86_64, x86_64h, arm, aarch64, arm64
 typedef int a;