diff --git a/clang/lib/Driver/XRayArgs.cpp b/clang/lib/Driver/XRayArgs.cpp
--- a/clang/lib/Driver/XRayArgs.cpp
+++ b/clang/lib/Driver/XRayArgs.cpp
@@ -52,11 +52,20 @@
           << (std::string(XRayInstrumentOption) + " on " + Triple.str());
     }
   } else if (Triple.isOSFreeBSD() || Triple.isOSOpenBSD() ||
-             Triple.isOSNetBSD() || Triple.isMacOSX()) {
+             Triple.isOSNetBSD()) {
     if (Triple.getArch() != llvm::Triple::x86_64) {
       D.Diag(diag::err_drv_clang_unsupported)
           << (std::string(XRayInstrumentOption) + " on " + Triple.str());
     }
+  } else if (Triple.isMacOSX()) {
+    switch (Triple.getArch()) {
+    case llvm::Triple::x86_64:
+    case llvm::Triple::aarch64:
+      break;
+    default:
+      D.Diag(diag::err_drv_clang_unsupported)
+          << (std::string(XRayInstrumentOption) + " on " + Triple.str());
+    }
   } else if (Triple.getOS() == llvm::Triple::Fuchsia) {
     switch (Triple.getArch()) {
     case llvm::Triple::x86_64:
diff --git a/clang/test/Driver/XRay/xray-instrument-macos.c b/clang/test/Driver/XRay/xray-instrument-macos.c
--- a/clang/test/Driver/XRay/xray-instrument-macos.c
+++ b/clang/test/Driver/XRay/xray-instrument-macos.c
@@ -1,4 +1,5 @@
+// RUN: %clang -o /dev/null -v -fxray-instrument -target aarch64-apple-darwin20 -c %s
 // RUN: %clang -o /dev/null -v -fxray-instrument -target x86_64-apple-macos10.11 -c %s
 // RUN: %clang -o /dev/null -v -fxray-instrument -target x86_64-apple-darwin15 -c %s
-// REQUIRES: x86_64 || x86_64h
+// REQUIRES: aarch64 || x86_64 || x86_64h
 typedef int a;
diff --git a/clang/test/Driver/XRay/xray-instrument-os.c b/clang/test/Driver/XRay/xray-instrument-os.c
--- a/clang/test/Driver/XRay/xray-instrument-os.c
+++ b/clang/test/Driver/XRay/xray-instrument-os.c
@@ -1,4 +1,4 @@
 // RUN: not %clang -o /dev/null -v -fxray-instrument -c %s
-// XFAIL: target={{.*-(linux|freebsd).*}}, target=x86_64-apple-{{(darwin|macos).*}}
+// XFAIL: target={{.*-(linux|freebsd).*}}, target={{(aarch64|x86_64)-apple-(darwin|macos).*}}
 // REQUIRES: target={{(amd64|x86_64|x86_64h|arm|aarch64|arm64)-.*}}
 typedef int a;