diff --git a/clang-tools-extra/clangd/Compiler.cpp b/clang-tools-extra/clangd/Compiler.cpp
--- a/clang-tools-extra/clangd/Compiler.cpp
+++ b/clang-tools-extra/clangd/Compiler.cpp
@@ -80,6 +80,15 @@
   CI.getFrontendOpts().PluginArgs.clear();
   CI.getFrontendOpts().ProgramAction = frontend::ParseSyntaxOnly;
   CI.getFrontendOpts().ActionName.clear();
+
+  // These options mostly affect codegen, and aren't relevant to clangd. And
+  // clang will die immediately when these files are not existed.
+  // Disable these uninteresting options to make clangd more robust.
+  CI.getLangOpts()->NoSanitizeFiles.clear();
+  CI.getLangOpts()->XRayAttrListFiles.clear();
+  CI.getLangOpts()->ProfileListFiles.clear();
+  CI.getLangOpts()->XRayAlwaysInstrumentFiles.clear();
+  CI.getLangOpts()->XRayNeverInstrumentFiles.clear();
 }
 
 std::unique_ptr<CompilerInvocation>
diff --git a/clang-tools-extra/clangd/unittests/DiagnosticsTests.cpp b/clang-tools-extra/clangd/unittests/DiagnosticsTests.cpp
--- a/clang-tools-extra/clangd/unittests/DiagnosticsTests.cpp
+++ b/clang-tools-extra/clangd/unittests/DiagnosticsTests.cpp
@@ -824,6 +824,19 @@
   EXPECT_THAT(*TU.build().getDiagnostics(), IsEmpty());
 }
 
+TEST(DiagnosticTest, IgnoreBEFilelistOptions) {
+  auto TU = TestTU::withCode("");
+  TU.ExtraArgs.push_back("-Xclang");
+  for (const auto *DisableOption :
+       {"-fsanitize-ignorelist=null", "-fprofile-list=null",
+        "-fxray-always-instrument=null", "-fxray-never-instrument=null",
+        "-fxray-attr-list=null"}) {
+    TU.ExtraArgs.push_back(DisableOption);
+    EXPECT_THAT(*TU.build().getDiagnostics(), IsEmpty());
+    TU.ExtraArgs.pop_back();
+  }
+}
+
 // Recursive main-file include is diagnosed, and doesn't crash.
 TEST(DiagnosticsTest, RecursivePreamble) {
   auto TU = TestTU::withCode(R"cpp(