diff --git a/clang-tools-extra/clang-include-fixer/tool/CMakeLists.txt b/clang-tools-extra/clang-include-fixer/tool/CMakeLists.txt
--- a/clang-tools-extra/clang-include-fixer/tool/CMakeLists.txt
+++ b/clang-tools-extra/clang-include-fixer/tool/CMakeLists.txt
@@ -20,9 +20,9 @@
   findAllSymbols
   )
 
-install(PROGRAMS clang-include-fixer.el
+install(FILES clang-include-fixer.el
   DESTINATION "${CMAKE_INSTALL_DATADIR}/clang"
   COMPONENT clang-include-fixer)
-install(PROGRAMS clang-include-fixer.py
+install(FILES clang-include-fixer.py
   DESTINATION "${CMAKE_INSTALL_DATADIR}/clang"
   COMPONENT clang-include-fixer)
diff --git a/clang/CMakeLists.txt b/clang/CMakeLists.txt
--- a/clang/CMakeLists.txt
+++ b/clang/CMakeLists.txt
@@ -418,7 +418,7 @@
   endif()
 
   add_custom_target(bash-autocomplete DEPENDS utils/bash-autocomplete.sh)
-  install(PROGRAMS utils/bash-autocomplete.sh
+  install(FILES utils/bash-autocomplete.sh
           DESTINATION "${CMAKE_INSTALL_DATADIR}/clang"
           COMPONENT bash-autocomplete)
   if(NOT LLVM_ENABLE_IDE)
diff --git a/clang/tools/clang-format/CMakeLists.txt b/clang/tools/clang-format/CMakeLists.txt
--- a/clang/tools/clang-format/CMakeLists.txt
+++ b/clang/tools/clang-format/CMakeLists.txt
@@ -20,19 +20,19 @@
   add_subdirectory(fuzzer)
 endif()
 
-install(PROGRAMS clang-format-bbedit.applescript
+install(FILES clang-format-bbedit.applescript
   DESTINATION "${CMAKE_INSTALL_DATADIR}/clang"
   COMPONENT clang-format)
 install(PROGRAMS clang-format-diff.py
   DESTINATION "${CMAKE_INSTALL_DATADIR}/clang"
   COMPONENT clang-format)
-install(PROGRAMS clang-format-sublime.py
+install(FILES clang-format-sublime.py
   DESTINATION "${CMAKE_INSTALL_DATADIR}/clang"
   COMPONENT clang-format)
-install(PROGRAMS clang-format.el
+install(FILES clang-format.el
   DESTINATION "${CMAKE_INSTALL_DATADIR}/clang"
   COMPONENT clang-format)
-install(PROGRAMS clang-format.py
+install(FILES clang-format.py
   DESTINATION "${CMAKE_INSTALL_DATADIR}/clang"
   COMPONENT clang-format)
 install(PROGRAMS git-clang-format
diff --git a/clang/tools/clang-rename/CMakeLists.txt b/clang/tools/clang-rename/CMakeLists.txt
--- a/clang/tools/clang-rename/CMakeLists.txt
+++ b/clang/tools/clang-rename/CMakeLists.txt
@@ -18,9 +18,9 @@
   clangToolingRefactoring
   )
 
-install(PROGRAMS clang-rename.py
+install(FILES clang-rename.py
   DESTINATION "${CMAKE_INSTALL_DATADIR}/clang"
   COMPONENT clang-rename)
-install(PROGRAMS clang-rename.el
+install(FILES clang-rename.el
   DESTINATION "${CMAKE_INSTALL_DATADIR}/clang"
   COMPONENT clang-rename)
diff --git a/clang/tools/scan-build-py/CMakeLists.txt b/clang/tools/scan-build-py/CMakeLists.txt
--- a/clang/tools/scan-build-py/CMakeLists.txt
+++ b/clang/tools/scan-build-py/CMakeLists.txt
@@ -87,7 +87,7 @@
                        ${CMAKE_BINARY_DIR}/lib/libscanbuild/
                      DEPENDS ${CMAKE_CURRENT_SOURCE_DIR}/lib/libscanbuild/${lib})
   list(APPEND Depends ${CMAKE_BINARY_DIR}/lib/libscanbuild/${lib})
-  install(PROGRAMS lib/libscanbuild/${lib}
+  install(FILES lib/libscanbuild/${lib}
           DESTINATION lib${CLANG_LIBDIR_SUFFIX}/libscanbuild
           COMPONENT scan-build-py)
 endforeach()
@@ -105,7 +105,7 @@
                        ${CMAKE_BINARY_DIR}/lib/libscanbuild/resources
                      DEPENDS ${CMAKE_CURRENT_SOURCE_DIR}/lib/libscanbuild/resources/${resource})
   list(APPEND Depends ${CMAKE_BINARY_DIR}/lib/libscanbuild/resources/${resource})
-  install(PROGRAMS lib/libscanbuild/resources/${resource}
+  install(FILES lib/libscanbuild/resources/${resource}
           DESTINATION lib${CLANG_LIBDIR_SUFFIX}/libscanbuild/resources
           COMPONENT scan-build-py)
 endforeach()
@@ -121,7 +121,7 @@
                        ${CMAKE_BINARY_DIR}/lib/libear/
                      DEPENDS ${CMAKE_CURRENT_SOURCE_DIR}/lib/libear/${lib})
   list(APPEND Depends ${CMAKE_BINARY_DIR}/lib/libear/${lib})
-  install(PROGRAMS lib/libear/${lib}
+  install(FILES lib/libear/${lib}
           DESTINATION lib${CLANG_LIBDIR_SUFFIX}/libear
           COMPONENT scan-build-py)
 endforeach()