diff --git a/mlir/lib/Dialect/Linalg/Transforms/ComprehensiveBufferize.cpp b/mlir/lib/Dialect/Linalg/Transforms/ComprehensiveBufferize.cpp
--- a/mlir/lib/Dialect/Linalg/Transforms/ComprehensiveBufferize.cpp
+++ b/mlir/lib/Dialect/Linalg/Transforms/ComprehensiveBufferize.cpp
@@ -515,14 +515,6 @@
   return op->getResult(0);
 }
 
-/// Return the OpResult that may bufferize into the same buffer as `opOperand`
-/// when the op is bufferized inplace.
-/// Return null if no such result exists.
-static OpResult getInplaceableOpResult(tensor::CastOp op,
-                                       OpOperand &opOperand) {
-  return op->getResult(0);
-}
-
 /// Return the OpResult that may bufferize into the same buffer as `opOperand`
 /// when the op is bufferized inplace.
 /// The inplace analysis uses this information along with interfering read
@@ -533,8 +525,7 @@
       // clang-format off
         // Ops that perform destructive updates on operand(s) to produce
         // result(s).
-        .Case<tensor::CastOp,
-              scf::ForOp,
+        .Case<scf::ForOp,
               InsertSliceOp,
               LinalgOp,
               TiledLoopOp,
@@ -542,7 +533,8 @@
             [&](auto op) { return getInplaceableOpResult(op, opOperand); })
         // Some ops just return an alias to an operand when bufferized inplace.
         // Such OpResults are never inplaceable on an OpOperand.
-        .Case<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp>(
+        .Case<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp,
+              tensor::CastOp>(
             [] (auto op) { return OpResult(); })
         // CallOpInterface is special, it needs to wait for the callee to be
         // bufferized and needs to inspect the BufferAliasInfo object. It can't
@@ -562,9 +554,8 @@
   if (!hasKnownBufferizationAliasingBehavior(result.getDefiningOp()))
     return SmallVector<OpOperand *>();
   TypeSwitch<Operation *>(result.getDefiningOp())
-      .Case([&](tensor::CastOp op) { r.push_back(&op->getOpOperand(0)); })
-      .Case<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp>(
-          [&](auto op) { r.push_back(&op->getOpOperand(0)); })
+      .Case<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp,
+            tensor::CastOp>([&](auto op) { r.push_back(&op->getOpOperand(0)); })
       // In the case of scf::ForOp, this currently assumes the iter_args / yield
       // are 1-1. This may fail and is verified at the end.
       // TODO: update this.
@@ -619,6 +610,14 @@
   return OpResult();
 }
 
+/// If the a tensor::CastOp is bufferized in-place, the source operand will
+/// alias with the result.
+static OpResult getAliasingOpResult(tensor::CastOp op, OpOperand &opOperand) {
+  if (&op->getOpOperand(0) == &opOperand)
+    return op->getResult(0);
+  return OpResult();
+}
+
 /// Determine which OpResult will alias with `opOperand` if the op is bufferized
 /// in place. This is a superset of `getInplaceableOpResult`.
 /// TODO: in the future this may need to evolve towards a list of OpResult.
@@ -627,7 +626,8 @@
       // Some ops are different: Their result is not inplaceable on an OpOperand
       // but when bufferized inplace, their result is aliasing (a subregion of)
       // an OpOperand.
-      .Case<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp>(
+      .Case<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp,
+            tensor::CastOp>(
           [&](auto op) { return getAliasingOpResult(op, opOperand); })
       // All other ops, return the result of `getInplaceableOpResult`.
       .Default(
@@ -648,8 +648,8 @@
   while (!workingSet.empty()) {
     OpOperand *uMaybeReading = workingSet.pop_back_val();
     // Skip over all ops that create an alias but do not read.
-    if (isa<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp>(
-            uMaybeReading->getOwner()))
+    if (isa<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp,
+            tensor::CastOp>(uMaybeReading->getOwner()))
       for (OpOperand &use : uMaybeReading->getOwner()->getResult(0).getUses())
         workingSet.push_back(&use);
     if (bufferizesToMemoryRead(*uMaybeReading))
@@ -667,8 +667,8 @@
     return true;
   // Some ops alone do not bufferize to a memory read, but one of their uses
   // may.
-  if (isa<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp>(
-          opOperand.getOwner()))
+  if (isa<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp,
+          tensor::CastOp>(opOperand.getOwner()))
     return false;
   // scf::ForOp alone doesn't bufferize to a memory read, one of the uses of its
   // matching bbArg may.
@@ -700,8 +700,8 @@
     return false;
   // Some ops alone do not bufferize to a memory write, but one of their uses
   // may.
-  if (isa<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp>(
-          opOperand.getOwner()))
+  if (isa<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp,
+          tensor::CastOp>(opOperand.getOwner()))
     return false;
   // CallOpInterface alone doesn't bufferize to a memory write, one of the uses
   // of the matching bbArg may. It is the responsibility of the caller to
@@ -2357,7 +2357,8 @@
 
     // Special logic to analyze ops who's OpResults are not inplaceable on an
     // OpOperand but may create an alias.
-    if (isa<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp>(op))
+    if (isa<ExtractSliceOp, TensorCollapseShapeOp, TensorExpandShapeOp,
+            tensor::CastOp>(op))
       if (failed(
               bufferizableInPlaceAnalysisAliasOnlyOp(op, aliasInfo, domInfo)))
         return failure();