diff --git a/compiler-rt/lib/tsan/CMakeLists.txt b/compiler-rt/lib/tsan/CMakeLists.txt
--- a/compiler-rt/lib/tsan/CMakeLists.txt
+++ b/compiler-rt/lib/tsan/CMakeLists.txt
@@ -91,8 +91,8 @@
   rtl/tsan_ilist.h
   rtl/tsan_interceptors.h
   rtl/tsan_interface.h
+  rtl/tsan_interface.inc
   rtl/tsan_interface_ann.h
-  rtl/tsan_interface_inl.h
   rtl/tsan_interface_java.h
   rtl/tsan_mman.h
   rtl/tsan_mutexset.h
@@ -105,7 +105,7 @@
   rtl/tsan_symbolize.h
   rtl/tsan_sync.h
   rtl/tsan_trace.h
-  rtl/tsan_update_shadow_word_inl.h
+  rtl/tsan_update_shadow_word.inc
   rtl/tsan_vector_clock.h
   )
 
diff --git a/compiler-rt/lib/tsan/rtl/tsan_interface_inl.h b/compiler-rt/lib/tsan/rtl/tsan_interface.inc
rename from compiler-rt/lib/tsan/rtl/tsan_interface_inl.h
rename to compiler-rt/lib/tsan/rtl/tsan_interface.inc
--- a/compiler-rt/lib/tsan/rtl/tsan_interface_inl.h
+++ b/compiler-rt/lib/tsan/rtl/tsan_interface.inc
@@ -1,4 +1,4 @@
-//===-- tsan_interface_inl.h ------------------------------------*- C++ -*-===//
+//===-- tsan_interface.inc --------------------------------------*- C++ -*-===//
 //
 // Part of the LLVM Project, under the Apache License v2.0 with LLVM Exceptions.
 // See https://llvm.org/LICENSE.txt for license information.
diff --git a/compiler-rt/lib/tsan/rtl/tsan_rtl.cpp b/compiler-rt/lib/tsan/rtl/tsan_rtl.cpp
--- a/compiler-rt/lib/tsan/rtl/tsan_rtl.cpp
+++ b/compiler-rt/lib/tsan/rtl/tsan_rtl.cpp
@@ -696,28 +696,28 @@
   // threads, which is not enough for the unrolled loop.
 #if SANITIZER_DEBUG
   for (int idx = 0; idx < 4; idx++) {
-#  include "tsan_update_shadow_word_inl.h"
+#  include "tsan_update_shadow_word.inc"
   }
 #else
   int idx = 0;
-#  include "tsan_update_shadow_word_inl.h"
+#  include "tsan_update_shadow_word.inc"
   idx = 1;
   if (stored) {
-#  include "tsan_update_shadow_word_inl.h"
+#  include "tsan_update_shadow_word.inc"
   } else {
-#  include "tsan_update_shadow_word_inl.h"
+#  include "tsan_update_shadow_word.inc"
   }
   idx = 2;
   if (stored) {
-#  include "tsan_update_shadow_word_inl.h"
+#  include "tsan_update_shadow_word.inc"
   } else {
-#  include "tsan_update_shadow_word_inl.h"
+#  include "tsan_update_shadow_word.inc"
   }
   idx = 3;
   if (stored) {
-#  include "tsan_update_shadow_word_inl.h"
+#  include "tsan_update_shadow_word.inc"
   } else {
-#  include "tsan_update_shadow_word_inl.h"
+#  include "tsan_update_shadow_word.inc"
   }
 #endif
 
@@ -1140,5 +1140,5 @@
 
 #if !SANITIZER_GO
 // Must be included in this file to make sure everything is inlined.
-#  include "tsan_interface_inl.h"
+#  include "tsan_interface.inc"
 #endif
diff --git a/compiler-rt/lib/tsan/rtl/tsan_update_shadow_word_inl.h b/compiler-rt/lib/tsan/rtl/tsan_update_shadow_word.inc
rename from compiler-rt/lib/tsan/rtl/tsan_update_shadow_word_inl.h
rename to compiler-rt/lib/tsan/rtl/tsan_update_shadow_word.inc
--- a/compiler-rt/lib/tsan/rtl/tsan_update_shadow_word_inl.h
+++ b/compiler-rt/lib/tsan/rtl/tsan_update_shadow_word.inc
@@ -1,4 +1,4 @@
-//===-- tsan_update_shadow_word_inl.h ---------------------------*- C++ -*-===//
+//===-- tsan_update_shadow_word.inc -----------------------------*- C++ -*-===//
 //
 // Part of the LLVM Project, under the Apache License v2.0 with LLVM Exceptions.
 // See https://llvm.org/LICENSE.txt for license information.
diff --git a/llvm/utils/gn/secondary/compiler-rt/lib/tsan/BUILD.gn b/llvm/utils/gn/secondary/compiler-rt/lib/tsan/BUILD.gn
--- a/llvm/utils/gn/secondary/compiler-rt/lib/tsan/BUILD.gn
+++ b/llvm/utils/gn/secondary/compiler-rt/lib/tsan/BUILD.gn
@@ -64,10 +64,10 @@
     "rtl/tsan_interceptors_posix.cpp",
     "rtl/tsan_interface.cpp",
     "rtl/tsan_interface.h",
+    "rtl/tsan_interface.inc",
     "rtl/tsan_interface_ann.cpp",
     "rtl/tsan_interface_ann.h",
     "rtl/tsan_interface_atomic.cpp",
-    "rtl/tsan_interface_inl.h",
     "rtl/tsan_interface_java.cpp",
     "rtl/tsan_interface_java.h",
     "rtl/tsan_malloc_mac.cpp",
@@ -96,7 +96,7 @@
     "rtl/tsan_sync.cpp",
     "rtl/tsan_sync.h",
     "rtl/tsan_trace.h",
-    "rtl/tsan_update_shadow_word_inl.h",
+    "rtl/tsan_update_shadow_word.inc",
     "rtl/tsan_vector_clock.cpp",
     "rtl/tsan_vector_clock.h",
   ]