diff --git a/llvm/include/llvm/Support/FileSystem.h b/llvm/include/llvm/Support/FileSystem.h
--- a/llvm/include/llvm/Support/FileSystem.h
+++ b/llvm/include/llvm/Support/FileSystem.h
@@ -865,6 +865,11 @@
   // The open file descriptor.
   int FD = -1;
 
+#ifdef _WIN32
+  // Whether we need to manually delete the file on close.
+  bool DeleteOnClose = false;
+#endif
+
   // Keep this with the given name.
   Error keep(const Twine &Name);
 
diff --git a/llvm/lib/Support/Path.cpp b/llvm/lib/Support/Path.cpp
--- a/llvm/lib/Support/Path.cpp
+++ b/llvm/lib/Support/Path.cpp
@@ -1188,6 +1188,10 @@
   FD = Other.FD;
   Other.Done = true;
   Other.FD = -1;
+#ifdef _WIN32
+  DeleteOnClose = Other.DeleteOnClose;
+  Other.DeleteOnClose = false;
+#endif
   return *this;
 }
 
@@ -1202,9 +1206,17 @@
   FD = -1;
 
 #ifdef _WIN32
-  // On windows closing will remove the file.
-  TmpName = "";
-  return Error::success();
+  // On windows closing will remove the file, if we managed to set
+  // the delete disposition. If not, delete it manually.
+  std::error_code RemoveEC;
+  if (DeleteOnClose && !TmpName.empty()) {
+    RemoveEC = fs::remove(TmpName);
+    if (!RemoveEC)
+      TmpName = "";
+  } else {
+    TmpName = "";
+  }
+  return errorCodeToError(RemoveEC);
 #else
   // Always try to close and remove.
   std::error_code RemoveEC;
@@ -1225,20 +1237,29 @@
 #ifdef _WIN32
   // If we can't cancel the delete don't rename.
   auto H = reinterpret_cast<HANDLE>(_get_osfhandle(FD));
-  std::error_code RenameEC = setDeleteDisposition(H, false);
+  bool Delete = false;
+  std::error_code RenameEC = setDeleteDisposition(H, Delete);
+  DeleteOnClose = false;
   if (!RenameEC) {
     RenameEC = rename_handle(H, Name);
     // If rename failed because it's cross-device, copy instead
     if (RenameEC ==
       std::error_code(ERROR_NOT_SAME_DEVICE, std::system_category())) {
       RenameEC = copy_file(TmpName, Name);
-      setDeleteDisposition(H, true);
+      Delete = true;
+      setDeleteDisposition(H, Delete);
+      if (!Delete)
+        DeleteOnClose = true;
     }
   }
 
   // If we can't rename, discard the temporary file.
-  if (RenameEC)
-    setDeleteDisposition(H, true);
+  if (RenameEC) {
+    Delete = true;
+    setDeleteDisposition(H, Delete);
+    if (!Delete)
+      DeleteOnClose = true;
+  }
 #else
   std::error_code RenameEC = fs::rename(TmpName, Name);
   if (RenameEC) {
@@ -1269,8 +1290,10 @@
 
 #ifdef _WIN32
   auto H = reinterpret_cast<HANDLE>(_get_osfhandle(FD));
-  if (std::error_code EC = setDeleteDisposition(H, false))
+  bool Delete = false;
+  if (std::error_code EC = setDeleteDisposition(H, Delete))
     return errorCodeToError(EC);
+  DeleteOnClose = false;
 #else
   sys::DontRemoveFileOnSignal(TmpName);
 #endif
@@ -1295,7 +1318,22 @@
     return errorCodeToError(EC);
 
   TempFile Ret(ResultPath, FD);
-#ifndef _WIN32
+#ifdef _WIN32
+  auto H = reinterpret_cast<HANDLE>(_get_osfhandle(FD));
+  bool Delete = true;
+  // TODO: This causes duplicate calls to setDeleteDisposition as createUniqueFile
+  // also calls it internally, but we can't easily know whether it succeeded or not.
+  // We can't leave out OF_Delete from the call, because it's needed to set the
+  // DELETE access mode flag.
+  if (std::error_code EC = setDeleteDisposition(H, Delete)) {
+    consumeError(Ret.discard());
+    return errorCodeToError(EC);
+  }
+  // If we weren't able to set flag for implicitly deleting the file on
+  // close, make a note to delete it manually.
+  if (!Delete)
+    Ret.DeleteOnClose = true;
+#else
   if (sys::RemoveFileOnSignal(ResultPath)) {
     // Make sure we delete the file when RemoveFileOnSignal fails.
     consumeError(Ret.discard());
diff --git a/llvm/lib/Support/Windows/Path.inc b/llvm/lib/Support/Windows/Path.inc
--- a/llvm/lib/Support/Windows/Path.inc
+++ b/llvm/lib/Support/Windows/Path.inc
@@ -401,7 +401,7 @@
   return is_local_internal(FinalPath, Result);
 }
 
-static std::error_code setDeleteDisposition(HANDLE Handle, bool Delete) {
+static std::error_code setDeleteDisposition(HANDLE Handle, bool &Delete) {
   // Clear the FILE_DISPOSITION_INFO flag first, before checking if it's a
   // network file. On Windows 7 the function realPathFromHandle() below fails
   // if the FILE_DISPOSITION_INFO flag was already set to 'DeleteFile = true' by
@@ -426,8 +426,10 @@
   if (std::error_code EC = is_local_internal(FinalPath, IsLocal))
     return EC;
 
-  if (!IsLocal)
+  if (!IsLocal) {
+    Delete = false;
     return std::error_code();
+  }
 
   // The file is on a local drive, we can safely set FILE_DISPOSITION_INFO's
   // flag.
@@ -1184,7 +1186,8 @@
   }
 
   if (Flags & OF_Delete) {
-    if ((EC = setDeleteDisposition(Result, true))) {
+    bool Delete = true;
+    if ((EC = setDeleteDisposition(Result, Delete))) {
       ::CloseHandle(Result);
       return errorCodeToError(EC);
     }